High-performance semiconductor spare parts for critical operations
Eumetrys Spare Parts delivers fast, multi-brand semiconductor spare parts to minimize downtime and ensure operational continuity. We act as a trusted partner for semiconductor manufacturers and maintenance professionals, delivering tailored sourcing and logistics solutions with the responsiveness and expertise required by the industry’s most demanding environments. Our value lies in our ability to act quickly and precisely, minimizing production interruptions and supporting long-term equipment performance.

Reliable sourcing of semiconductor spares for every toolset
At Eumetrys Spare Parts, our expertise in semiconductor spares covers a wide range of tools and equipment from major industry brands. We provide fast access to essential spare parts whether in stock or sourced globally to keep your production lines running efficiently. Our sourcing capabilities include motors, drivers, sensors, and laser units, as well as critical components for CMP, metrology, and robotics tools.
Our service goes beyond the simple delivery of parts: it is based on deep technical know-how, a precise understanding of each tool’s architecture, and a proactive sourcing approach. Each request is treated with urgency, ensuring that downtime is minimized and operational risks are mitigated. We work closely with maintenance teams and procurement departments to provide tailor-made solutions, even for rare or obsolete references.
We understand the criticality of each part and offer sourcing solutions that guarantee performance, compatibility, and fast turnaround. With a strong network and a responsive logistics chain, we serve the full semiconductor spares store landscape. Our support includes technical validation, traceability, and ongoing assistance to ensure total confidence from quote to delivery. Whether you need one urgent replacement or a full list of stock replenishments, our team offers a seamless, secure experience tailored to the pace of semiconductor manufacturing.

Supplying critical needs in the semiconductor consumable market
Our expertise extends to the semiconductor consumable market, delivering recurring-use materials essential for keeping fabrication environments operational. In this fast-paced sector, consumables are often underestimated in their importance yet they are foundational to uptime and process reliability.
Semiconductor consumables are key to sustaining operations yet often overlooked in traditional supply chains. At Eumetrys, we provide high-usage components like semiconductor consumable parts (lamps, PMTs, filters), reference substrates, and thermal consumables. We also ensure a stable supply of liners and seals for vacuum chambers for semiconductor equipment.
From routine restocking to emergency sourcing, we act quickly to secure availability, vet compatibility, and verify quality. Our clients count on us for reliability and short response times, helping them secure continuity with precision. Whether for production lines or cleanroom R&D, our offer includes the full range of semiconductor components and consumables.
We also support centralized purchasing strategies, enabling facilities to optimize procurement and reduce the time lost on fragmented ordering. This results in greater purchasing efficiency, lower costs, and enhanced compliance with internal quality standards.
Optimized support for CMP semiconductor equipment upgrades and maintenance
Our solutions for CMP semiconductor equipment bring direct operational benefits to manufacturers and maintenance professionals. These systems are complex, with multiple wear points and process-critical consumables that require precise monitoring and timely replacement.
We supply compatible spare parts, deliver performance-enhancing CMP equipment semiconductor upgrades, and assemble preventive maintenance kits tailored to your process. Our support includes wear-sensitive parts such as semiconductor equipment seals, valves, and components exposed to frequent stress.
We also integrate technical recommendations and upgrade strategies that support tool longevity and process optimization. This technical insight, combined with cross-brand compatibility knowledge, enables us to support legacy and advanced CMP platforms. We also provide hard-to-source modules for semiconductor laser equipment and sensor interfaces.
Our commitment doesn’t stop at delivery. We provide post-sale follow-up, logistics assistance, and technical documentation where necessary, allowing teams to maintain high standards of quality and traceability throughout their maintenance cycle.

Your partner for strategic semiconductor equipment spare parts
As a European leader in semiconductor equipment spare parts, Eumetrys Spare Parts offers an efficient and reliable alternative to traditional OEM procurement models. Our business model is designed to provide speed, clarity, and control all while maintaining compatibility and reliability across tools and brands.
Our strengths lie in short lead times, dedicated customer support, and a multilingual interface to facilitate seamless navigation and requests. We maintain a structured and searchable catalogue aligned with the needs of the semiconductor equipment spare parts market, integrating parts for tools across multiple brands.
Beyond standard inventory, we also source specialty items, including cables for semiconductor equipment market needs. Our sourcing team evaluates each request based on technical requirements, brand compatibility, and urgency of delivery. We provide upgrades for semiconductor equipment sensors, ensuring compatibility with both legacy and advanced systems. In addition, we manage critical replacements for obsolete tools, offering alternatives and sourcing from verified partners to avoid production disruption. This positions us as a proactive actor in the semiconductor spare parts market, with an approach centered on responsiveness and accuracy. As a result, we are recognized as a key contributor to the semiconductor equipment spares business, delivering solutions that align with the industry’s exacting standards.
In a context where OEMs often provide rigid and time-consuming procurement processes, Eumetrys Spare Parts brings flexibility and tailored support. We don’t just provide parts we deliver continuity, confidence, and an agile sourcing strategy adapted to your operational tempo.
Designed for speed: our platform for semiconductor consumables
To address the specificities of semiconductor consumables, we have developed a platform that blends efficiency with technical precision. Designed around user needs, it supports fast decision-making while offering in-depth part traceability.
Users benefit from a search engine capable of filtering by part number, tool type, or brand. The platform supports real-time inventory updates and request-for-quote modules tailored to each client’s operational context. We provide traceability, delivery follow-up, and multilingual support to assist teams globally.
Whether you need a replacement module from the vacuum parts for semiconductor equipment market or support on obsolete components, our model is structured to ensure agility. Our multilingual team, combined with strategic partnerships, allows us to react fast and scale with demand.
In addition, our platform is integrated into a broader digital strategy that includes SEO optimization, dedicated customer support, and long-term account management. This makes it more than a simple catalogue: it’s a strategic procurement tool built for reliability and performance.

Why choose Eumetrys Spare Parts?
We are also proud to support the spares parts manufacturing for semiconductors market, where precision, reliability, and rapid availability define success. By integrating technical expertise with real-time sourcing capabilities, we help manufacturers secure essential components without compromise.
Eumetrys Spare Parts delivers trusted, time-sensitive solutions for cleanrooms, fabs, and integrated semiconductor facility and consumables ecosystems. Our offer stands out thanks to:
Our multi-brand capability supporting leading OEMs like amat and KLA-Tencor. Our logistics ensure critical speed, often delivering in hours rather than weeks. Each request is handled by an industry-trained specialist, ensuring expertise in every step of the process. And we remain a smart alternative, offering flexibility without compromise.
This combination of technical rigor and customer focus enables us to meet the exacting standards of the semiconductor industry. We adapt to each client’s workflow, anticipate recurring needs, and continually optimize sourcing flows to avoid bottlenecks. Our mission is to reduce downtime, control costs, and support scalable operations across the entire semiconductor sector.